This is the Dataplot data file FURNACE.DAT Data provided by Barry Hembre of AMD. This data set is analyzed as a case study in the "Production Process Characterization" chapter of the NIST/SEMATECH Engineering Statistics Handbook. The URL for this case study is: http://www.itl.nist.gov/div898/handbook/ppc/section5/ppc51.htm Contact--Barry Hembree, AMD Number of observations = 168 Number of observations per line image = 4 Order of variables on a line image-- 1. Factor Variable RUN = Run Number 2. Factor Variable ZONE = Each furnace has 4 "zones" 3. Factor Variable WAFER = Within each zone, 2 wafers are measured 4. Dependent Variable THICKNESS = Film Thickness (Angstroms) To read this file into Dataplot-- SKIP 25 READ FURNACE.DAT RUN ZONE WAFER THICKNESS RUN ZONE WAFER THICKNESS -------------------------------- 1 1 1 546 1 1 2 540 1 2 1 566 1 2 2 564 1 3 1 577 1 3 2 546 1 4 1 543 1 4 2 529 2 1 1 561 2 1 2 556 2 2 1 577 2 2 2 553 2 3 1 563 2 3 2 577 2 4 1 556 2 4 2 540 3 1 1 515 3 1 2 520 3 2 1 548 3 2 2 542 3 3 1 505 3 3 2 487 3 4 1 506 3 4 2 514 4 1 1 568 4 1 2 584 4 2 1 570 4 2 2 545 4 3 1 589 4 3 2 562 4 4 1 569 4 4 2 571 5 1 1 550 5 1 2 550 5 2 1 562 5 2 2 580 5 3 1 560 5 3 2 554 5 4 1 545 5 4 2 546 6 1 1 584 6 1 2 581 6 2 1 567 6 2 2 558 6 3 1 556 6 3 2 560 6 4 1 591 6 4 2 599 7 1 1 593 7 1 2 626 7 2 1 584 7 2 2 559 7 3 1 634 7 3 2 598 7 4 1 569 7 4 2 592 8 1 1 522 8 1 2 535 8 2 1 535 8 2 2 581 8 3 1 527 8 3 2 520 8 4 1 532 8 4 2 539 9 1 1 562 9 1 2 568 9 2 1 548 9 2 2 548 9 3 1 533 9 3 2 553 9 4 1 533 9 4 2 521 10 1 1 555 10 1 2 545 10 2 1 584 10 2 2 572 10 3 1 546 10 3 2 552 10 4 1 586 10 4 2 584 11 1 1 565 11 1 2 557 11 2 1 583 11 2 2 585 11 3 1 582 11 3 2 567 11 4 1 549 11 4 2 533 12 1 1 548 12 1 2 528 12 2 1 563 12 2 2 588 12 3 1 543 12 3 2 540 12 4 1 585 12 4 2 586 13 1 1 580 13 1 2 570 13 2 1 556 13 2 2 569 13 3 1 609 13 3 2 625 13 4 1 570 13 4 2 595 14 1 1 564 14 1 2 555 14 2 1 585 14 2 2 588 14 3 1 564 14 3 2 583 14 4 1 563 14 4 2 558 15 1 1 550 15 1 2 557 15 2 1 538 15 2 2 525 15 3 1 556 15 3 2 547 15 4 1 534 15 4 2 542 16 1 1 552 16 1 2 547 16 2 1 563 16 2 2 578 16 3 1 571 16 3 2 572 16 4 1 575 16 4 2 584 17 1 1 549 17 1 2 546 17 2 1 584 17 2 2 593 17 3 1 567 17 3 2 548 17 4 1 606 17 4 2 607 18 1 1 539 18 1 2 554 18 2 1 533 18 2 2 535 18 3 1 522 18 3 2 521 18 4 1 547 18 4 2 550 19 1 1 610 19 1 2 592 19 2 1 587 19 2 2 587 19 3 1 572 19 3 2 612 19 4 1 566 19 4 2 563 20 1 1 569 20 1 2 609 20 2 1 558 20 2 2 555 20 3 1 577 20 3 2 579 20 4 1 552 20 4 2 558 21 1 1 595 21 1 2 583 21 2 1 599 21 2 2 602 21 3 1 598 21 3 2 616 21 4 1 580 21 4 2 575